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Use of the line-shaped electron beam in silicon-on-insulator (SOI) — a new opportunity in semiconductors

✍ Scribed by A. Shibata

Publisher: Elsevier Science
Year: 1985
Weight: 210 KB
Volume: 25
Category: Article
ISSN: 0146-5724
DOI: 10.1016/0146-5724(85)90162-1

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📂 Article 📅 1974 🏛 Elsevier Science 🌐 English ⚖ 143 KB