563. On the influence of thermal process
✦ LIBER ✦
302. Calculation of the shape of the surface of a metlted zone after crystallization on electron-beam micromachining of semiconductors: V M Korsunkskiy and I A Yavorskiy, Methods of Miniaturiz and Automatiz of Manufact of Computer Elements, Coll, Kiev 1972, 67–82 (in Russian)
- Publisher
- Elsevier Science
- Year
- 1974
- Tongue
- English
- Weight
- 143 KB
- Volume
- 24
- Category
- Article
- ISSN
- 0042-207X
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