563. On the influence of thermal process
✦ LIBER ✦
304. On the problem of distribution of impurities in silicon on electron-beam local alloying: Yu A Sterenbogen et al, Methods of Miniaturiz and Automatiz of Manufact of Computer Elements, Coll, Kiev 1972, 58–66 (in Russian)
- Publisher
- Elsevier Science
- Year
- 1974
- Tongue
- English
- Weight
- 143 KB
- Volume
- 24
- Category
- Article
- ISSN
- 0042-207X
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