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A new route for length measurement by phase-shifting interferometry

✍ Scribed by ZhiYong Luo; ZhangHong Li

Book ID: 118814469
Publisher: Science in China Press (SCP)
Year: 2012
Tongue: English
Weight: 657 KB
Volume: 55
Category: Article
ISSN: 1672-1799
DOI: 10.1007/s11433-012-4668-y

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