✦ LIBER ✦
MEMS profilometry by low coherence phase shifting interferometry: Effect of the light spectrum for high precision measurements
✍ Scribed by S. Jorez; A. Cornet; J-P. Raskin
- Publisher
- Elsevier Science
- Year
- 2006
- Tongue
- English
- Weight
- 281 KB
- Volume
- 263
- Category
- Article
- ISSN
- 0030-4018
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