Simultaneous measurement of surface shape and absolute optical thickness of a glass plate by wavelength tuning phase-shifting interferometry

✍ Scribed by Kenichi Hibino, Yangjin Kim, Sangyu Lee, Yohan Kondo, Naohiko Sugita, Mamoru Mitsuishi

• Book ID: 118790544
• Publisher: Optical Society of Japan
• Year: 2012
• Tongue: English
• Weight: 590 KB
• Volume: 19
• Category: Article
• ISSN: 1340-6000
• DOI: 10.1007/s10043-012-0038-2