Simultaneous measurement of several near-parallel surfaces with wavelength-shifting interferometry and a tunable phase-shifting method

✍ Scribed by Jan Burke; Kenichi Hibino; Ryohei Hanayama; Bozenko F. Oreb

• Publisher: Elsevier Science
• Year: 2007
• Tongue: English
• Weight: 830 KB
• Volume: 45
• Category: Article
• ISSN: 0143-8166
• DOI: 10.1016/j.optlaseng.2005.12.009