A new oxidation-resistant CoSi2 process for self-aligned silicidation (salicide) technology

✍ Scribed by Yung-Song Lou; Ching-Yuan Wu; Huang-Chung Cheng

• Publisher: Elsevier Science
• Year: 1993
• Tongue: English
• Weight: 940 KB
• Volume: 36
• Category: Article
• ISSN: 0038-1101
• DOI: 10.1016/0038-1101(93)90071-w