✦ LIBER ✦
Electrical evaluation of high-temperature effects on gate oxide integrity in a self-aligned CoSi2 MOS process
✍ Scribed by T.E. Karlin; S.-L. Zhang; K.-H. Rydén; S. Nygren; M. Östling; F.M. d'Heurle
- Publisher
- Elsevier Science
- Year
- 1993
- Tongue
- English
- Weight
- 255 KB
- Volume
- 73
- Category
- Article
- ISSN
- 0169-4332
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