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A New Metal-Organic Precursor for the Low-Temperature Atmospheric Pressure Chemical Vapor Deposition of Zinc Oxide Films

✍ Scribed by S. Suh; D. M. Hoffman; L. M. Atagi; D. C. Smith

Book ID: 110239687
Publisher: Springer
Year: 1999
Tongue: English
Weight: 79 KB
Volume: 18
Category: Article
ISSN: 0261-8028
DOI: 10.1023/a:1006689017053

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cm 3 in comparison to 1.8 g/cm 3 obtained for SiBCN 3 synthesized by polymer pyrolysis. High hardness values up to 22 GPa are found, which might be further increased by reducing the residual hydrogen content by applying higher bias potentials or by reduced precursor flow. ## Experimental The expe