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A new fabrication method for low stress PECVD - SiN x layers

✍ Scribed by Ong, Poh Lam; Wei, Jiashen; Tay, Francis E H; Iliescu, Ciprian


Book ID
124098457
Publisher
Institute of Physics
Year
2006
Tongue
English
Weight
329 KB
Volume
34
Category
Article
ISSN
1742-6588

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