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A new fabrication method for multicrystalline silicon layers on graphite substrates suited for low-cost thin film solar cells

✍ Scribed by M. Pauli; T. Reindl; W. Krühler; F. Homberg; J. Müller


Book ID
108029298
Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
768 KB
Volume
41-42
Category
Article
ISSN
0927-0248

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The dynamic vacuum wasca. torr during film formation and the molecular precursors were heated to a temperature defined as (80"-120 "C) so that sublimation/distillation into the heated chamber occurred at a rate of ca. 0.1 g/ h. The temperature gradient within the heated furnace was determined to be