✦ LIBER ✦
Low stress PECVD—SiN x layers at high deposition rates using high power and high frequency for MEMS applications
✍ Scribed by Iliescu, Ciprian; Tay, Francis E H; Wei, Jiashen
- Book ID
- 118131585
- Publisher
- Institute of Physics
- Year
- 2006
- Tongue
- English
- Weight
- 201 KB
- Volume
- 16
- Category
- Article
- ISSN
- 0960-1317
No coin nor oath required. For personal study only.