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A new etching method for single-crystal Al2O3 film on Si using Si ion implantation

✍ Scribed by Makoto Ishida; Hoon Kim; Takayuki Kimura; Tetsuro Nakamura


Book ID
103959800
Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
533 KB
Volume
53
Category
Article
ISSN
0924-4247

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