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Development of a new MBE growth method for fabrication of high quality, double epitaxial Si/γ-Al2O3/Si structures

✍ Scribed by H. Ogata; H. Hanafusa; K. Yoneda


Publisher
Elsevier Science
Year
1989
Tongue
English
Weight
446 KB
Volume
95
Category
Article
ISSN
0022-0248

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