A novel fabrication method of Si mesoscopic structures on Al2O3 by selective epitaxial growth using electron beam irradiation

✍ Scribed by Shun-ichi Yanagiya; Hiroyuki Wado; Mamoru Yoshimoto; Makoto Ishida

• Book ID: 108023969
• Publisher: Elsevier Science
• Year: 1996
• Tongue: English
• Weight: 331 KB
• Volume: 227
• Category: Article
• ISSN: 0921-4526
• DOI: 10.1016/0921-4526(96)00432-2