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A NEW APPROACH TO THE OBSERVATION OF THE RESIST IN X-RAY CONTACT MICROSCOPY

✍ Scribed by Kunio Shinohara; Sadao Aoki; Mihiro Yanagihara; Akira Yagishita; Yasuo Iguchi; Akira Tanaka

Book ID: 114894829
Publisher: John Wiley and Sons
Year: 1986
Tongue: English
Weight: 807 KB
Volume: 44
Category: Article
ISSN: 0031-8655
DOI: 10.1111/j.1751-1097.1986.tb04683.x

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