A model for hillock growth in Al thin fi
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Soo-Jung Hwang; William D. Nix; Young-Chang Joo
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Article
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2007
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Elsevier Science
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English
β 231 KB
The dependence of total hillock volume (per unit area) on film thickness and annealing temperature has been studied in pure aluminum films. The total hillock volume (per unit area) increases linearly with both the film thickness and annealing temperature. Other characteristics involve a critical tem