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A model for power law creep controlled hillock growth

✍ Scribed by Lucas A. Berla; Young-Chang Joo; William D. Nix


Book ID
103842792
Publisher
Elsevier Science
Year
2008
Tongue
English
Weight
368 KB
Volume
488
Category
Article
ISSN
0921-5093

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A model for hillock growth in Al thin fi
✍ Soo-Jung Hwang; William D. Nix; Young-Chang Joo πŸ“‚ Article πŸ“… 2007 πŸ› Elsevier Science 🌐 English βš– 231 KB

The dependence of total hillock volume (per unit area) on film thickness and annealing temperature has been studied in pure aluminum films. The total hillock volume (per unit area) increases linearly with both the film thickness and annealing temperature. Other characteristics involve a critical tem