✦ LIBER ✦
Post Si(C)N hillock nucleation and growth in IC copper lines controlled by diffusional creep
✍ Scribed by A. Timma; P. Caubet; B. Chenevier; O. Thomas; B. Kaouache; L. Dumas; P. Normandon; J.C. Giraudin
- Book ID
- 104052436
- Publisher
- Elsevier Science
- Year
- 2010
- Tongue
- English
- Weight
- 927 KB
- Volume
- 87
- Category
- Article
- ISSN
- 0167-9317
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