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A method for ion etching depth control

✍ Scribed by B Goncić; T Jokić; N Popović; Ž Bogdanov

Publisher: Elsevier Science
Year: 1992
Tongue: English
Weight: 819 KB
Volume: 43
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(92)90097-g

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