A method for ion etching depth control : B. Goncic, T. Jokic, N. Popovic and Z. Bogdanov. Vacuum43(5–7), 641 (1992)

• Publisher: Elsevier Science
• Year: 1993
• Tongue: English
• Weight: 61 KB
• Volume: 33
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(93)90248-w