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A GeSi-buffer structure for growth of high-quality GaAs epitaxial layers on a Si substrate

✍ Scribed by Edward Y. Chang; Tsung-Hsi Yang; Guangli Luo; Chun-Yen Chang


Publisher
Springer US
Year
2005
Tongue
English
Weight
177 KB
Volume
34
Category
Article
ISSN
0361-5235

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High Quality GaN Layers on Si(111) Subst
✍ Hageman, P.R. ;Haffouz, S. ;Kirilyuk, V. ;Grzegorczyk, A. ;Larsen, P.K. πŸ“‚ Article πŸ“… 2001 πŸ› John Wiley and Sons 🌐 English βš– 91 KB πŸ‘ 2 views

We present a study on the material properties of GaN films grown on (111) silicon substrates by low-pressure metalorganic chemical vapour deposition using AlN buffer layers. This buffer layer is optimised with respect to growth temperature and time for the optical and structural properties of the Ga