## Abstract In this communication, the design and the fabrication of a siliconβglass microsystem for labβonβchip sensing applications have been reported. Each component has been realised using wet etch process and the porous silicon (PSi) technology, while the final device has been obtained intimat
A fast integrated optical sensor of gaseous substances
β Scribed by A. A. Egorov; M. A. Egorov; A. V. Stavtsev; A. G. Timakin; T. K. Chekhlova
- Publisher
- Springer US
- Year
- 2010
- Tongue
- English
- Weight
- 379 KB
- Volume
- 31
- Category
- Article
- ISSN
- 1573-8760
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