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A low-cost and highly integrated fiber optical pressure sensor system

✍ Scribed by F. Ceyssens; M. Driesen; K. Wouters; R. Puers; K.U. Leuven

Publisher
Elsevier Science
Year
2008
Tongue
English
Weight
795 KB
Volume
145-146
Category
Article
ISSN
0924-4247

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✦ Synopsis

This paper presents a simple, affordable, fiber-optic based pressure measurement system, in which both sensor and readout parts are constructed using batch micromachining techniques, supplemented with some straightforward assembly steps. Prototypes of relative and absolute pressure sensors parts and a readout part have been realized. Goal of this research is to enable deployment of such harsh-environment sensors in high-volume, low-cost applications.

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