We describe a simple graphical method for measuring film thickness by XPS, which we call a Thickogram. This method can be used even when the film and substrate peaks have very different kinetic energies and incorporates the effects of elastic scattering within the recommended range of take-off angle
โฆ LIBER โฆ
A dual laser beam method for wavy film thickness measurement
โ Scribed by J.E.R. Coney; E.A.M. El-Shafei; C.G.W. Sheppard
- Publisher
- Elsevier Science
- Year
- 1989
- Tongue
- English
- Weight
- 654 KB
- Volume
- 11
- Category
- Article
- ISSN
- 0143-8166
No coin nor oath required. For personal study only.
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