The Thickogram: a method for easy film thickness measurement in XPS

✍ Scribed by Peter J Cumpson

• Publisher: John Wiley and Sons
• Year: 2000
• Tongue: English
• Weight: 87 KB
• Volume: 29
• Category: Article
• ISSN: 0142-2421
• DOI: 10.1002/1096-9918(200006)29:6<403::aid-sia884>3.0.co;2-8

✦ Synopsis

We describe a simple graphical method for measuring film thickness by XPS, which we call a Thickogram. This method can be used even when the film and substrate peaks have very different kinetic energies and incorporates the effects of elastic scattering within the recommended range of take-off angles.