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A method for fitting the Fuchs-Sondheimer theory to resistivity-thickness measurements for all film thicknesses

✍ Scribed by G.N. Gould; L.A. Moraga

Publisher
Elsevier Science
Year
1972
Tongue
English
Weight
212 KB
Volume
10
Category
Article
ISSN
0040-6090

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We describe a simple graphical method for measuring film thickness by XPS, which we call a Thickogram. This method can be used even when the film and substrate peaks have very different kinetic energies and incorporates the effects of elastic scattering within the recommended range of take-off angle