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A channeling investigation of light-ion damage in diamond

✍ Scribed by T.E. Derry; R.W. Fearick; J.P.F. Sellschop


Publisher
Elsevier Science
Year
1980
Weight
398 KB
Volume
170
Category
Article
ISSN
0029-554X

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The diamond Raman lines were examined around the He' ion implantation-induced channels in chemical vapor deposited Ðlms over Si substrates. Several spectra from di †erent positions around the channels, formed at di †erent target currents, were obtained using a Raman microprobe. It is concluded that