A capacitive thickness gage with improved measuring characteristics
β Scribed by V. N. Dorogov; S. N. Shvaiko
- Book ID
- 112418066
- Publisher
- Springer US
- Year
- 1975
- Tongue
- English
- Weight
- 115 KB
- Volume
- 18
- Category
- Article
- ISSN
- 0543-1972
No coin nor oath required. For personal study only.
π SIMILAR VOLUMES
It is well known that capacitance-voltage (C2V) measurements provide a simple determination of oxide thickness, but with the scaling down of components the classical method is not appropriated any more. We have observed that for two devices with the same oxide thickness and different surfaces, the c
The phase difference between s-and p-polarizations of a circularly polarized heterodyne light beam reflected from a transparent plate is measured. The measured data is substituted into the specially derived equations and the refractive index can be calculated. Next, the variations of phase differenc