✦ LIBER ✦

A batch process to deposit amorphous metallic Mo–Si–N films

✍ Scribed by H. Kattelus; H. Heikkinen; A. Häärä; M. Ylönen; A. Tolkki

Book ID: 110442417
Publisher: Springer US
Year: 2003
Tongue: English
Weight: 536 KB
Volume: 14
Category: Article
ISSN: 0957-4522
DOI: 10.1023/a:1023925423733

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Potential of amorphous Mo–Si–N films for

Potential of amorphous Mo–Si–N films for nanoelectronic applications

✍ M. Ylönen; H. Kattelus; A. Savin; P. Kivinen; T. Haatainen; J. Ahopelto 📂 Article 📅 2003 🏛 Elsevier Science 🌐 English ⚖ 123 KB

The properties of amorphous metallic molybdenum-silicon-nitrogen (Mo-Si-N) films were characterised for use in nanoelectronic applications. The films were deposited by co-sputtering of molybdenum and silicon targets in a gas mixture of argon and nitrogen. The atomic composition, microstructure and s

Deposition and characterization of amorp

Deposition and characterization of amorphous and micro-crystalline Si,C alloy thin films by a remote plasma-enhanced chemical-vapor deposition process - RPECVD

✍ C. Wang; G. Lucovsky; R.J. Nemanich 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 410 KB

Dependence of a-Sl:H/Si3N4 interface pro

Dependence of a-Sl:H/Si3N4 interface properties on the deposition sequence in amorphous silicon thin film transistor produced by remote PECVD process

✍ S.S. Kim; G.N. Parsons; G.G. Fountain; G. Lucovsky 📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 203 KB

Solid state reactions and diffusion proc

Solid state reactions and diffusion processes in metal - Si3N4 - Si thin film systems—a comparison between Cr, Co and Ni metals

✍ F Edelman; E.Y Gutmanas; R Brener 📂 Article 📅 1990 🏛 Elsevier Science 🌐 English ⚖ 316 KB

Employing a detailed compositional analy

Employing a detailed compositional analysis to develop a low defect Mo/Si deposition tool and process for EUVL mask blanks

✍ Andy Ma; Rajul Randive; Patrick Kearney; San-In Han; Soon-Cheon Seo; Toshiyuki U 📂 Article 📅 2006 🏛 Elsevier Science 🌐 English ⚖ 150 KB

Electron field emission fromsp2-induced

Electron field emission fromsp2-induced insulating to metallic behaviour of amorphous carbon (a-C) films

✍ Pitamber Mahanandia; P. N. Viswakarma; Prasad Vishnu Bhotla; S. V. Subramanyam; 📂 Article 📅 2010 🏛 Springer-Verlag 🌐 English ⚖ 1011 KB