Solid state reactions and diffusion processes in metal - Si3N4 - Si thin film systems—a comparison between Cr, Co and Ni metals

✍ Scribed by F Edelman; E.Y Gutmanas; R Brener

• Publisher: Elsevier Science
• Year: 1990
• Tongue: English
• Weight: 316 KB
• Volume: 41
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(90)93930-h