𝔖 Bobbio Scriptorium

✦ LIBER ✦

7502. Epitaxial growth of Cu films on Si by ionized cluster beam deposition: M Sosnowski et al, 23. J Vac Sci Technol, A8, 1990, 1470–1473

Publisher: Elsevier Science
Year: 1991
Tongue: English
Weight: 147 KB
Volume: 42
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(91)91570-e

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