✦ LIBER ✦
7516. Electromigration lifetime and crystal structure of thin aluminum film connectors for microelectronic devices deposited by the ionized cluster beam technique: R E Hummel et al,J Vac Sci Technol, A8, 1990, 1437–1442
- Publisher
- Elsevier Science
- Year
- 1991
- Tongue
- English
- Weight
- 156 KB
- Volume
- 42
- Category
- Article
- ISSN
- 0042-207X
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