𝔖 Bobbio Scriptorium

✦ LIBER ✦

7211. Deposition of Cu film on SiO2 using a partially ionized beam: P Bai et al,J Vac Sci Technol, A8, 1990, 1465–1469

Publisher: Elsevier Science
Year: 1991
Tongue: English
Weight: 154 KB
Volume: 42
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(91)91018-j

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