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6H-SiC p+-n junctions fabricated by beryllium implantation

✍ Scribed by Ramungul, N.; Khemka, V.; Zheng, Y.; Patel, R.; Chow, T.P.


Book ID
114537573
Publisher
IEEE
Year
1999
Tongue
English
Weight
179 KB
Volume
46
Category
Article
ISSN
0018-9383

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