4513905 Integrated circuit metallization technique
β Scribed by Ronald Nowicki; JohnF Moulder
- Publisher
- Elsevier Science
- Year
- 1986
- Tongue
- English
- Weight
- 97 KB
- Volume
- 26
- Category
- Article
- ISSN
- 0026-2714
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π SIMILAR VOLUMES
Relaxation-based techniques for the transient analysis of largescale integrated circuits are promising candidates for a new generation of circuit simulators. The present note investigates the convergence of the discretized waveform relaxation. It is demonstrated that a SOR technique has the potentia
A new method for determining Hamaker constants was examined for materials of interest in integrated circuit manufacture. An ultra-high vacuum atomic force microscope and an atomic force microscope operated in a nitrogen environment were used to measure the interaction forces between metals, dielectr