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3960. Hydrogen evolution from plasma-deposited amorphous silicon films. (USA)


Publisher
Elsevier Science
Year
1979
Tongue
English
Weight
149 KB
Volume
29
Category
Article
ISSN
0042-207X

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Preparation of hydrogenated amorphous si
โœ J Huran; J ล afrรกnkovรก; A.P. Kobzev ๐Ÿ“‚ Article ๐Ÿ“… 1998 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 252 KB

Thin silicon carbide (SiCI films were prepared by plasma enhanced chemical vapour deposition PECVDI. The structural properties of Sic films were investigated by IR, RBS, and ERD measurement techniques. The results showed that the films contain the typical features found in hydrogenated amorphous Sic