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3120. Sputtering and deposition of condensed matter in the low-pressure-discharge

Book ID: 104264417
Publisher: Elsevier Science
Year: 1977
Tongue: English
Weight: 139 KB
Volume: 27
Category: Article
ISSN: 0042-207X
DOI: 10.1016/s0042-207x(77)80586-1

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