X-ray photoelectron spectroscopy of ther
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G. Hollinger; Y. Jugnet; P. Pertosa; Tran Minh Duc
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Article
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1975
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Elsevier Science
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English
β 426 KB
At various stages of in situ therm31 oxiclztion of Si(lll) monocrystals, X-ray photoelectron spectroscopy (XPS or ESCA) t-eve& a shift in the silicon core-level binding energies which vties continuously from 2.4 to 4.2 eV. From the oxygen &d silicon ESCA peak intensities, these films un be said to h