✍ Scribed by P Braun; W Farber; G Betz; FP Viehböck
No coin nor oath required. For personal study only.
📜 SIMILAR VOLUMES
The advantages of ion etching over wet chemical etching are demonstrated, e,g. structure resolution in the region of the etching depth, no undercutting, excellent reproducibility and high adherence of small striplines.
## Abstract When thin overlayers on a bulk material have to be analysed by EPMA (electron probe microanalysis) or AES (Auger electron spectroscopy), the signal obtained is enhanced by three factors: (i) back‐scattering, (ii) characteristic x‐rays induced in the bulk by the primary beam and (iii) co
## Abstract Diffraction of both the primary electron beam and the excited Auger electrons are known to have an influence on the measured peak intensities in Auger electron spectroscopy (AES). In this work, crystalline effects have been measured for a number of single‐crystal materials under conditi