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1457. Properties and structuree of thin silicon films sputtered on fused quartz substrates.: H Y Kamagai, Trans Met Soc AIME, 236 (3), 1966, 295–299

Publisher: Elsevier Science
Year: 1966
Tongue: English
Weight: 164 KB
Volume: 16
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(66)91725-8

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