✦ LIBER ✦
Properties and structure of thin silicon films sputtered on fused quartz substrate : H. Y. Kumagai, J. M. Thompson and G. Krauss, Trans. Metall. Soc. AIME, 236, March (1966), p. 295
- Publisher
- Elsevier Science
- Year
- 1967
- Tongue
- English
- Weight
- 194 KB
- Volume
- 6
- Category
- Article
- ISSN
- 0026-2714
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