𝔖 Bobbio Scriptorium

✦ LIBER ✦

133. Properties and structure of thin silicon films sputtered on fused quartz substrates: H Y Kumagai et al,AIME Trans, 236,1966, 295–299

Publisher: Elsevier Science
Year: 1967
Tongue: English
Weight: 134 KB
Volume: 17
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(67)92665-6

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Properties and structure of thin silicon

Properties and structure of thin silicon films sputtered on fused quartz substrate : H. Y. Kumagai, J. M. Thompson and G. Krauss, Trans. Metall. Soc. AIME, 236, March (1966), p. 295

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