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144. Measuring the thickness of a dielectric film in the course of deposition: Yu G Yagoda and V E Minaichev,Izmerit Tekh, No 5, 1966, 56 (in Russian)

Publisher: Elsevier Science
Year: 1967
Tongue: English
Weight: 143 KB
Volume: 17
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(67)92676-0

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