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γ-irradiation effect on transparent conducting ZnO:Ga films

✍ Scribed by N. R. Aghamalyan; R. K. Hovsepyan; I. A. Gambaryan; E. A. Kafadaryan; S. I. Petrosyan; G. R. Badalyan; A. K. Shirinyan

Book ID
111505706
Publisher
Allerton Press, Inc.
Year
2010
Tongue
English
Weight
346 KB
Volume
45
Category
Article
ISSN
1068-3372

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## Abstract Sputtering deposition of Ga‐doped ZnO (ZnO:Ga) thin films was carried out using the helicon‐wave‐excited plasma sputtering (HWPS) method. The films sputtered above 150 °C had a preferential {0001} orientation. According to the surface‐damage‐free nature, the films having featureless sur