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ZrO2thin films on Si substrate

✍ Scribed by Yew Hoong Wong; Kuan Yew Cheong

Book ID: 106398583
Publisher: Springer US
Year: 2010
Tongue: English
Weight: 514 KB
Volume: 21
Category: Article
ISSN: 0957-4522
DOI: 10.1007/s10854-010-0144-5

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