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ZrO2 thin films and ZrO2/SiO2 optical reflection filters deposited by sol–gel method

✍ Scribed by Qinyuan Zhang; Xiaoli Li; Jun Shen; Guangming Wu; Jue Wang; Lingyan Chen

Book ID
117356065
Publisher
Elsevier Science
Year
2000
Tongue
English
Weight
654 KB
Volume
45
Category
Article
ISSN
0167-577X

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✍ Cheng-Hsing Hsu; Ching-Fang Tseng; Chun-Hung Lai; Hsin-Han Tung; Shih-Yao Lin 📂 Article 📅 2010 🏛 Elsevier Science 🌐 English ⚖ 558 KB

In this paper, we investigated electrical properties and microstructures of ZrTiO 4 (ZrO 2 -TiO 2 ) thin films prepared by the sol-gel method on ITO substrates at different annealing temperatures. All films exhibited ZrTiO 4 (1 1 1) and (1 0 1) orientations perpendicular to the substrate surface, an