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ZnO single-crystal films fabricated by the oxidation of zinc-implanted sapphire

✍ Scribed by Xiao, X H; Ren, F; Fan, L X; Cai, G X; Jiang, C Z


Book ID
121463192
Publisher
Institute of Physics
Year
2008
Tongue
English
Weight
768 KB
Volume
19
Category
Article
ISSN
0957-4484

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Photoluminescence properties of ZnO thin
✍ Tu Anh Trinh; In Seok Hong; Hwa Ryun Lee; Yong Sub Cho πŸ“‚ Article πŸ“… 2009 πŸ› Elsevier Science 🌐 English βš– 388 KB

ZnO thin films on sapphire substrate were fabricated by ion implantation combined with thermal oxidation. A sapphire substrate was implanted with 50 keV zinc ions at 350 Β°C with a fluence of 1.5 Γ‚ 10 17 ions cm Γ€2 , then annealed in a tube furnace in oxygen ambient in 2 h at 650 Β°C. Photoluminescenc