We report here the fabrication method and operation of Zinc-vapor diffused channel waveguides on ErbiumrYtterbium Ž . Ž . Ž . ErrYb -doped Lithium Niobate LiNbO . electron cyclotron resonance ECR plasma deposition technique, UV pho-3 Ž . tolithography and Reactive Ion Etching RIE are used to define
✦ LIBER ✦
Zn-diffused LiNbO3waveguides fabricated by
✍ Scribed by L. Aghli-Moghadam; A. Baghizadeh; G. Nabiyouni; A. Farashiani; A. Zendehnam
- Book ID
- 106021762
- Publisher
- Springer
- Year
- 2009
- Tongue
- English
- Weight
- 328 KB
- Volume
- 97
- Category
- Article
- ISSN
- 1432-0630
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## Abstract Process‐dependence characteristics of Zn‐diffused waveguides on a y‐cut, x‐propagation LiNbO~3~ substrate at 1.55‐μm wavelength are presented for the first time. The experimental results show that a single‐mode waveguide of extraordinary polarization is easily fabricated and can serve a