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Zirconium acetylacetonate as a precursor for the chemical vapour deposition of ZrO2

✍ Scribed by N. Dzjubenko; L. Martynenko; N. Zharkova; E. Gavrischuk; A. Gibin

Book ID
103954212
Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
138 KB
Volume
18
Category
Article
ISSN
0921-5107

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